Error analysis in rotating compenstator ellipsometer

Rotating analyzer–fixed analyzer ellipsometer based on null type ellipsometer

The theory and design of an inexpensive rotating analyzer unit is presented, which allows a conventional null type ellipsometer to work as rotating analyzer–fixed analyzer automatic ellipsometer, without sacrificing the possibility to work in null mode. The mode switching is performed simply by adding or removing the rotating analyzer from its holder. It is shown that the rotating analyzer phas...

Single-element rotating-polarizer ellipsometer for film-substrate systems

Error-reduced channeled spectroscopic ellipsometer with palm-size sensing head.

This paper describes a newly developed prototype system of the channeled spectroscopic ellipsometer (CSE). The new system has a feature that the major systematic and random error sources of the previous CSEs are effectively reduced or compensated for. In addition, the prototype preserves the advantageous features of the CSE in that it has a palm-size sensing head and that its acquisition time i...

Combined Spatial Filter and Relay Systems in Rotating Compensator Ellipsometer/Polimeter

Liphardt et al. (*) Notice: Subject to any disclaimer, the term of this patent is extended or adjusted under 35 U.S.C. 154(b) by 0 days. This patent is subject to a terminal dis-claimer. ABSTRACT Low aberration relay systems modified to perform as spatial filters in rotating compensator ellipsometer, polarimeter and the like systems.

Rotating or Rotatable Compensator Spectroscopic Ellipsometer System Including Multiple Element Lenses